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Category: | Photo acid generator |
Chemical name | Triphenylsulfonium [(1-adamantylmethoxy)carbonyl]difluoromethanesulfonate |
CAS NO.: | 1022939-88-3 |
Molecular Formula: | C31H32F2O5S2 |
Molecular Weight: | 586.71 |
Application: | Photo acid generator for ArF or ArFi |
Purity | 99.5% |
Chemical Structure: