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Triphenylsulfonium [(1-adamantylmethoxy)carbonyl]difluoromethanesulfonate

CAS NO. 1022939-88-3

Product Code: CA001

Category:Photo acid generator
Chemical name Triphenylsulfonium [(1-adamantylmethoxy)carbonyl]difluoromethanesulfonate
CAS NO.:1022939-88-3
Molecular Formula:C31H32F2O5S2
Molecular Weight:586.71
Application:Photo acid generator for ArF or ArFi
Purity99.5%


Chemical Structure:

结构式




Related Keywords: photo acid generator,PAG